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Cornell University

Helbling Research Group

aquatic science and technology

PFAS in photolithography

Paige’s paper on the evolution of PFASs during photolithography has been published in Environmental Science & Technology!

We report on the concentrations of total fluorine (TF), adsorbable organic fluorine (AOF), and individual PFASs in commercial photolithography products and on the evolution of organofluorine-containing compounds during photolithography experiments.